Electrostatic chucks

1-For the first time in China, diffusion welding was proposed to be applied to the manufacture of electrostatic chucks, and the relevant mechanical properties, air tightness properties, flow resistance properties, fatigue properties, and cleanliness performance tests were first completed;
2-Form a complete set of manufacturing processes and control points, including blank preparation, surface treatment, cavity deformation control, etc., which are successfully used in manufacturing;
3-Ultra-clean welding forming, and the pre-pressure process route to break the aluminum alloy oxide film;
4-Through a series of scientific research tests, research and development of magnesium chip transition medium, applied to product manufacturing, greatly improve the quality of welding.